1 天津工业大学 电子与信息工程学院, 天津 300387
2 天津市光电检测技术与系统重点实验室, 天津 300387
3 中国科学院 半导体研究所, 北京 100083
为了制备大面积周期性微纳米结构以提高LED的发光效率, 建立了劳厄德(Lloyd)干涉光刻系统。简单分析了该干涉光刻系统的工作原理, 并介绍了利用干涉曝光工艺制备一维光栅、二维点阵、孔阵列等纳米结构图形的具体实验过程。最后对纳米图形进行结构转移, 制备出了金属纳米结构。实验结果表明: 利用劳厄德干涉光刻系统, 可以在20 mm×20 mm大小的ITO衬底上稳定制备出周期为450 nm的均匀光栅或二维点阵列图形结构, 它们的占空比也是可以调节变化的。
干涉光刻 周期结构 发光二极管 光提取 interference lithography periodic structure light emitting diode light extraction
Author Affiliations
Abstract
1 School of Applied Sciences, Harbin University of Science and Technology, Harbin 150080, China
2 School of Information Engineering, Minzu University of China, Beijing 100081, China
3 Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
In this paper, we present the design, simulation, fabrication and characterization of a terahertz (THz) filter based on metamaterial consisting of the periodical double symmetric splits ring resonator (DS-SRR) array. We can observe that the metamaterial-based filter possesses a band-pass transmission when the electrical field is along y direction, and it possesses a low-pass transmission when the electrical field is along x direction. Our results demonstrate that the proposed filter can realize the switching between band-pass effect and low-pass effect by only changing the polarization direction of the incident electromagnetic wave. Moreover, the calculated surface current distributions are also used to analyze the switchable mechanism of the THz metamatrial filter. Therefore, the proposed THz wave filter has a potential application in THz wave communication systems.
光电子快报（英文版）
2015, 11(1): 33
